We explore the use of near-UV and mid-UV Nd:YAG laser for rapid micromachining for microfluidic applications. The laser ablation depths and precision on sapphire and silicon have been discussed.
High precision laser micromachining depths by pulsed ultraviolet and mid-UV Nd:YAG laser of sapphire and silicon for microfluidic applications
Conference on Lasers and Electro-Optics, 2004. (CLEO). ; 2 ; 3 pp. vol.2
01.01.2004
329835 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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