We explore the use of near-UV and mid-UV Nd:YAG laser for rapid micromachining for microfluidic applications. The laser ablation depths and precision on sapphire and silicon have been discussed.


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    Titel :

    High precision laser micromachining depths by pulsed ultraviolet and mid-UV Nd:YAG laser of sapphire and silicon for microfluidic applications


    Beteiligte:
    Tai-Chang Chen, (Autor:in) / Darling, R.B. (Autor:in)


    Erscheinungsdatum :

    01.01.2004


    Format / Umfang :

    329835 byte



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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