Interference between 20 ns 193 nm ArF laser beams is used for the fabrication of blazed gratings on Cyclotene (BCB, Dow) polymer films. The grating shape is tuned for almost complete power diffraction into the 1/sup st/ order.


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    Title :

    Direct laser fabrication of blazed diffraction gratings on polymer films


    Contributors:
    Hutchinson, G. (author) / Leng, Y. (author) / Yun, V. (author) / Du, M. (author) / Lucas, L. (author) / Lee, C.H. (author) / Herman, W.N. (author) / Goldhar, J. (author)


    Publication date :

    2004-01-01


    Size :

    245937 byte



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




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