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    Title :

    DTuD3 Optimization of electron beam dosages in direct-writing e-beam lithography for blazed diffraction gratings


    Contributors:
    Kikuta, H. (author) / Hirai, Y. (author) / Okano, M. (author) / Yotsuya, T. (author) / Yamamoto, K. (author)

    Conference:

    Conference, Diffractive optics and micro-optics ; 2000 ; Quebec City, Canada



    Publication date :

    2000-01-01


    Size :

    3 pages


    Remarks:

    Also known as DOMO 2000




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English





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