DTuD3 Optimization of electron beam dosages in direct-writing e-beam lithography for blazed diffraction gratings
Conference, Diffractive optics and micro-optics ; 2000 ; Quebec City, Canada
2000-01-01
3 pages
Also known as DOMO 2000
Conference paper
English
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Ruling Blazed, Aberration-Corrected Diffraction Gratings
NTRS | 1991
|British Library Conference Proceedings | 2002
|Hologram blazed diffraction gratings for a wide spectral range [3317-26]
British Library Conference Proceedings | 1997
|Performance of Beam Energy Sampling Gratings Fabricated with E-Beam Direct Writing
British Library Conference Proceedings | 2002
|