Interference between 20 ns 193 nm ArF laser beams is used for the fabrication of blazed gratings on Cyclotene (BCB, Dow) polymer films. The grating shape is tuned for almost complete power diffraction into the 1/sup st/ order.
Direct laser fabrication of blazed diffraction gratings on polymer films
Conference on Lasers and Electro-Optics, 2004. (CLEO). ; 2 ; 3 pp. vol.2
2004-01-01
245937 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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