Summary form only given. In this talk, we will review the progress in selective area epitaxy using organometallic chemical vapor deposition (OMCVD) on substrates with patterned masks. Selective area epitaxy enables one to obtain lateral control of thickness, composition and doping.


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    Title :

    Selective area OMCVD and its applications


    Contributors:
    Bhat, R. (author)


    Publication date :

    1995-01-01


    Size :

    74305 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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