Summary form only given. In this talk, we will review the progress in selective area epitaxy using organometallic chemical vapor deposition (OMCVD) on substrates with patterned masks. Selective area epitaxy enables one to obtain lateral control of thickness, composition and doping.
Selective area OMCVD and its applications
01.01.1995
74305 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Selective Area OMCVD and its Applications
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