Summary form only given. In this talk, we will review the progress in selective area epitaxy using organometallic chemical vapor deposition (OMCVD) on substrates with patterned masks. Selective area epitaxy enables one to obtain lateral control of thickness, composition and doping.


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    Titel :

    Selective area OMCVD and its applications


    Beteiligte:
    Bhat, R. (Autor:in)


    Erscheinungsdatum :

    01.01.1995


    Format / Umfang :

    74305 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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