Summary form only given. In this paper, we examine etch rates and surface morphology in ultrafast-laser micromachining of /spl sim/1 /spl mu/m diameter holes in fused silica. Shock-induced microcracking was a fundamental limitation of single pulse etching, but could be entirely avoided when mode-locked pulse trains were applied to rapidly micromachined surfaces (at /spl sim/20 /spl mu/m/pulse train).
Single-pulse and pulse-train effects in ultrafast-laser micromachining of fused silica
1999-01-01
402646 byte
Conference paper
Electronic Resource
English
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