Summary form only given. In this paper, we examine etch rates and surface morphology in ultrafast-laser micromachining of /spl sim/1 /spl mu/m diameter holes in fused silica. Shock-induced microcracking was a fundamental limitation of single pulse etching, but could be entirely avoided when mode-locked pulse trains were applied to rapidly micromachined surfaces (at /spl sim/20 /spl mu/m/pulse train).


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    Title :

    Single-pulse and pulse-train effects in ultrafast-laser micromachining of fused silica


    Contributors:
    Chen, R.P. (author) / Oettl, A. (author) / Herman, P.R. (author) / Marjoribanks, R.S. (author)


    Publication date :

    1999-01-01


    Size :

    402646 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




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