Summary form only given. In this paper, we examine etch rates and surface morphology in ultrafast-laser micromachining of /spl sim/1 /spl mu/m diameter holes in fused silica. Shock-induced microcracking was a fundamental limitation of single pulse etching, but could be entirely avoided when mode-locked pulse trains were applied to rapidly micromachined surfaces (at /spl sim/20 /spl mu/m/pulse train).


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    Titel :

    Single-pulse and pulse-train effects in ultrafast-laser micromachining of fused silica


    Beteiligte:
    Chen, R.P. (Autor:in) / Oettl, A. (Autor:in) / Herman, P.R. (Autor:in) / Marjoribanks, R.S. (Autor:in)


    Erscheinungsdatum :

    01.01.1999


    Format / Umfang :

    402646 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch






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