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    Title :

    Pulse control in high-power UV laser enables new micromachining options


    Contributors:
    Patel, R. (author) / Bovatsek, J. (author) / Tamhankar, A. (author)

    Published in:

    LASER FOCUS WORLD ; 49 , 4 ; 49-53


    Publication date :

    2013-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.366



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    Chen, R.P. / Oettl, A. / Herman, P.R. et al. | IEEE | 1999



    Excimer Laser Micromachining/Marking

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