An excimer lamp includes a plurality of arc tubes and an electrode pair. The electrode pair comprises a plurality of elongated electrode plates extending along a tube axis direction of the plurality of arc tubes. Each electrode plate comprises a polarity opposite that of an adjacent electrode plate (i.e., alternating polarities). The plurality of arc tubes and the plurality of electrode plates are disposed in an alternating side-by-side orientation such that an arc tube of the plurality of arc tubes is disposed between adjacent electrode plates of the plurality of electrode plates.
EXCIMER LAMP ELECTRODE GEOMETRY
2023-04-20
Patent
Electronic Resource
English
IPC: | H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS / A61L Verfahren oder Vorrichtungen zum Sterilisieren von Stoffen oder Gegenständen allgemein , METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL / B64D Ausrüstung für Flugzeuge , EQUIPMENT FOR FITTING IN OR TO AIRCRAFT |
STEREO-LITHOGRAPHY WITH XECL EXCIMER LAMP
British Library Conference Proceedings | 2000
|Stereolithography with XeCl excimer laser/lamp [3888-29]
British Library Conference Proceedings | 2000
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