An excimer lamp includes a dielectric tube, an end cap, a conductive hollow tube, and an electrode grid. The dielectric tube has a closed end and an open end, and defines a cavity. The end cap sealingly covers the open end. The conductive hollow tube passes through the end cap and into the cavity of the dielectric tube, with a volume defined between an exterior surface of the conductive hollow tube and an interior surface of the dielectric tube. The volume is configured to hold a gas. The electrode grid is disposed on an exterior surface of the dielectric tube.
Single-dielectric excimer lamp systems and methods
2022-05-24
Patent
Electronic Resource
English
IPC: | H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS / A61L Verfahren oder Vorrichtungen zum Sterilisieren von Stoffen oder Gegenständen allgemein , METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL / B64D Ausrüstung für Flugzeuge , EQUIPMENT FOR FITTING IN OR TO AIRCRAFT |
STEREO-LITHOGRAPHY WITH XECL EXCIMER LAMP
British Library Conference Proceedings | 2000
|Stereolithography with XeCl excimer laser/lamp [3888-29]
British Library Conference Proceedings | 2000
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