An excimer lamp includes a plurality of arc tubes and an electrode pair. The electrode pair comprises a plurality of elongated electrode plates extending along a tube axis direction of the plurality of arc tubes. Each electrode plate comprises a polarity opposite that of an adjacent electrode plate (i.e., alternating polarities). The plurality of arc tubes and the plurality of electrode plates are disposed in an alternating side-by-side orientation such that an arc tube of the plurality of arc tubes is disposed between adjacent electrode plates of the plurality of electrode plates.
EXCIMER LAMP ELECTRODE GEOMETRY
20.04.2023
Patent
Elektronische Ressource
Englisch
IPC: | H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS / A61L Verfahren oder Vorrichtungen zum Sterilisieren von Stoffen oder Gegenständen allgemein , METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL / B64D Ausrüstung für Flugzeuge , EQUIPMENT FOR FITTING IN OR TO AIRCRAFT |
STEREO-LITHOGRAPHY WITH XECL EXCIMER LAMP
British Library Conference Proceedings | 2000
|Stereolithography with XeCl excimer laser/lamp [3888-29]
British Library Conference Proceedings | 2000
|