The present invention relates to a substrate transfer apparatus comprising: a tray in which a substrate is placed; a magnetic transfer unit which is formed under the tray and magnetically levitates and transfers the tray; and a guide unit which is formed on the top of the tray and guides the transfer of the tray. Therefore, the present invention prevents generation of particles by transferring the tray in a non-contact manner.
본 발명은 기판을 안착하는 트레이와, 트레이의 하측에 마련되며 트레이를 자기 부상시키고 자기력에 의해 이송시키는 자기 이송 유닛과, 트레이의 상측에 마련되어 트레이의 이송을 가이드하는 가이드 유닛을 포함하는 기판 이송 장치를 제시한다.
APPARATUS FOR TRANSFERRING SUBSTRATE
기판 이송 장치
2016-06-07
Patent
Electronic Resource
Korean
IPC: | B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS , Transport- oder Lagervorrichtungen, z.B. Förderer zum Laden oder Abladen / B60L PROPULSION OF ELECTRICALLY-PROPELLED VEHICLES , Antrieb von elektrisch angetriebenen Fahrzeugen / G02F DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING,... , Vorrichtungen oder Anordnungen, deren optische Arbeitsweise durch Änderung der optischen Eigenschaften des Mediums der Vorrichtungen oder Anordnungen geändert wird zum Steuern der Intensität, Farbe, Phase, Polarisation oder der Richtung von... / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES |
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