본 발명은 기판을 안착하는 트레이와, 트레이의 하측에 마련되며 트레이를 자기 부상시키고 자기력에 의해 이송시키는 자기 이송 유닛과, 트레이의 상측에 마련되어 트레이의 이송을 가이드하는 가이드 유닛을 포함하는 기판 이송 장치를 제시한다.


    Access

    Download


    Export, share and cite



    Title :

    Apparatus for transferring substrate


    Additional title:

    기판 이송 장치


    Publication date :

    2017-02-21


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Korean


    Classification :

    IPC:    B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS , Transport- oder Lagervorrichtungen, z.B. Förderer zum Laden oder Abladen / B60L PROPULSION OF ELECTRICALLY-PROPELLED VEHICLES , Antrieb von elektrisch angetriebenen Fahrzeugen / G02F DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING,... , Vorrichtungen oder Anordnungen, deren optische Arbeitsweise durch Änderung der optischen Eigenschaften des Mediums der Vorrichtungen oder Anordnungen geändert wird zum Steuern der Intensität, Farbe, Phase, Polarisation oder der Richtung von... / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES



    SUBSTRATE TRANSFERRING APPARATUS AND SUBSTRATE TRANSFERRING METHOD

    YOON KISUB / JUNG JIYOON | European Patent Office | 2024

    Free access

    Substrate transferring arm and substrate transferring apparatus including the same

    CHOI YOUNG SEOK | European Patent Office | 2016

    Free access

    APPARATUS FOR TRANSFERRING SUBSTRATE

    KIM JUNG GUN / KIM SUN GIL / KIM NAM HOON et al. | European Patent Office | 2016

    Free access

    TRANSFERRING APPARATUS

    LEE JU HO / KIM SEOK HEE / YOON EUN SANG | European Patent Office | 2025

    Free access

    TRANSFERRING APPARATUS

    European Patent Office | 2022

    Free access