The invention discloses a wafer cassette clamping device, a clamping method and a crown block system.The wafer cassette clamping device comprises two clamping jaw assemblies, a connecting rod assembly and a locking piece, and the two clamping jaw assemblies are arranged in the first direction of the horizontal plane in a spaced mode; the two clamping jaw assemblies can synchronously move oppositely or oppositely in the first direction so as to be switched between the initial position and the clamping position. The connecting rod assembly is located between the two clamping jaw assemblies and comprises a rotating shaft extending in the second direction of the horizontal plane, the rotating shaft can rotate along the axis of the rotating shaft, a vertically-arranged rotating plate is fixed to the rotating shaft, two first rod bodies which are symmetrical relative to the center of the rotating shaft are hinged to the rotating plate, and the two first rod bodies are hinged to the two clamping jaw assemblies respectively. The locking piece is connected with the rotating shaft, and the locking piece provides a locking moment for the rotating shaft at the clamping position. The clamping device is short in response time, low in noise and large in clamping force, and stable clamping force is provided for the wafer box on the premise that no extra space is occupied.

    本发明公开了一种晶圆盒夹持装置、夹持方法和天车系统,晶圆盒夹持装置包括夹爪组件、连杆组件和锁紧件,夹爪组件沿水平面的第一方向间隔设置有两个,两个夹爪组件均能沿第一方向同步相对或相背移动以在初始位置和夹持位置之间切换。连杆组件位于两个夹爪组件之间,连杆组件包括沿水平面的第二方向延伸的转轴,转轴能沿自身轴线转动,转轴上固定有竖直设置的转动板,转动板上铰接有两个相对转轴中心对称的第一杆体,两个第一杆体分别和两个夹爪组件铰接。锁紧件和转轴连接,在夹持位置时,锁紧件为转轴提供一个锁止力矩。夹持装置响应时间短,噪音低,且夹持力大,在不占用额外空间的前提下,为晶圆盒提供稳定的夹持力。


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    Title :

    Wafer box clamping device, clamping method and crown block system


    Additional title:

    一种晶圆盒夹持装置、夹持方法和天车系统


    Contributors:
    ZHANG JIANQIANG (author) / ZHAO MENG (author) / CHEN FEI (author)

    Publication date :

    2025-05-23


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Chinese


    Classification :

    IPC:    B66C Krane , CRANES



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