According to the semiconductor wafer box automatic carrying and intelligent warehousing system provided by the invention, comprehensive optimization of the semiconductor wafer box carrying and warehousing system is realized by introducing an intelligent scheduling system, an accurate positioning technology, an efficient storage architecture and highly automatic control. Firstly, the carrying efficiency is greatly improved, human errors are reduced, and safe and accurate storage and taking of the wafer box are ensured. The intelligent scheduling and dynamic control capability enables the system to respond to the production demand in real time, optimizes the resource configuration, and significantly improves the automation and intelligence level. A flexible storage framework effectively improves the space utilization rate, large-scale high-frequency access operation is supported, and the requirements of modern production are met. Meanwhile, the high-precision positioning and stable access mechanism ensures the high efficiency of the production process and the consistency of the wafer quality.
本发明提供的一种半导体晶圆盒自动化搬运智能仓储系统,发明通过引入智能调度系统、精确定位技术、高效存储架构及高度自动化控制,实现了半导体晶圆盒搬运及仓储系统的全面优化。首先,大幅提升了搬运效率并减少了人为错误,确保晶圆盒的安全与准确存取。智能调度与动态控制能力使系统能够实时响应生产需求,优化资源配置,显著提高自动化与智能化水平。灵活的存储架构有效提升了空间利用率,支持大规模高频次的存取操作,满足现代生产的需求。同时,高精度定位与稳定存取机制保障了生产流程的高效与晶圆质量的一致性。
Automatic carrying intelligent warehousing system for semiconductor wafer cassettes
半导体晶圆盒自动化搬运智能仓储系统
2025-03-28
Patent
Electronic Resource
Chinese
Pallet fork assembly, warehousing robot, carrying system and warehousing system
European Patent Office | 2024
|Intelligent container carrier and carrying and warehousing method thereof
European Patent Office | 2023
|CARRYING DEVICE, WAREHOUSING LOGISTICS SYSTEM, AND PALLET CARRYING METHOD
European Patent Office | 2024
|