The invention provides a two-stage lifting and rotating device for wafer carrying, and the device comprises a pedestal which is internally provided with a Z1-axis driving unit, a Z1-axis transmission unit, and a Z1-axis guiding unit; the Z1 lifting seat is arranged in the base in a sleeved mode, and a Z2-axis driving unit, a Z2-axis transmission unit and a Z2-axis guiding unit are arranged in the Z1 lifting seat. The rotary motion seat is of a cylindrical hollow structure and is arranged in the Z1 lifting seat in a sleeved mode. According to the device, the Z1 lifting base is arranged in the base in a sleeved mode, the rotary movement base is arranged in the Z1 lifting base in a sleeved mode, a two-stage lifting mode is achieved, large-stroke lifting can be achieved in a limited height space, and rotary movement is achieved by arranging the rotary movement base; through the optimized arrangement of the Z1-axis linear guide rail and the Z2-axis linear guide rail and the mode that the Z1-axis driving unit, the Z1-axis transmission unit, the Z1-axis guiding unit, the Z2-axis driving unit, the Z2-axis transmission unit, the Z2-axis guiding unit and other component parts are integrated, the rigidity and stability of the whole structure of the two-stage lifting device are improved.

    本发明提出一种用于晶圆搬运的两级升降旋转装置,包括:基座,基座内包括Z1轴驱动单元、Z1轴传动单元以及Z1轴导向单元;Z1升降座套设于基座内,Z1升降座内设有Z2轴驱动单元、Z2轴传动单元以及Z2轴导向单元;旋转运动座为圆柱体中空结构,套设于Z1升降座内。本装置通过Z1升降座套设于基座内以及旋转运动座套设在Z1升降座内,实现两级升降模式,可以在有限高度空间下实现大行程升降,通过设置旋转运动座实现旋转运动;通过Z1轴直线导轨和Z2轴直线导轨的优化布置,Z1轴驱动单元、Z1轴传动单元以及Z1轴导向单元,Z2轴驱动单元、Z2轴传动单元以及Z2轴导向单元等组件部分零件一体化的方式,提高了两级升降装置整体结构的刚性和稳定性。


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    Title :

    Two-stage lifting and rotating device for wafer carrying


    Additional title:

    一种用于晶圆搬运的两级升降旋转装置


    Contributors:
    WENG CHUAN (author) / GU JIANSHENG (author) / ZHOU YANAN (author) / CUI YONGQIANG (author) / LUO XIN (author)

    Publication date :

    2025-01-24


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Chinese


    Classification :

    IPC:    B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last / B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS , Transport- oder Lagervorrichtungen, z.B. Förderer zum Laden oder Abladen / F16H Getriebe , GEARING / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES



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