The invention relates to the technical field of wafer processing equipment, and provides a crown block lifting device and a crown block system.The crown block lifting device comprises a mounting bottom plate, a movable track, a lifting mechanism and a limiting assembly, the movable track comprises a movable track profile and a track bottom plate, and the movable track profile is used for being in butt joint with an upper-layer fixed track of a maintenance area; the lifting mechanism comprises a lifting belt and a lifting driving assembly; the lifting driving assembly is used for driving the lifting belt to drive the movable track to lift; the limiting assembly comprises a plug pin mechanism and a limiting column, the limiting column is fixed to the mounting bottom plate, a through hole suitable for the limiting column to penetrate through is formed in the rail bottom plate, when the movable rail profile is in butt joint with the upper-layer fixed rail, the limiting column penetrates through the through hole, and a plug pin of the plug pin mechanism is matched with a plug pin base mounted on the rail bottom plate to limit the movable rail. The butt joint precision and stability of the movable track and the upper layer fixed track can be improved, the reliability is higher, and the equipment cost is lower.
本发明涉及晶圆加工设备技术领域,提供一种天车升降装置和天车系统,所述天车升降装置,包括:安装底板、活动轨道、升降机构和限位组件,其中,活动轨道包括活动轨道型材和轨道底板,活动轨道型材用于与维修区的上层固定轨道对接;升降机构包括升降带和升降驱动组件,升降驱动组件用于驱动升降带带动活动轨道升降;限位组件包括插销机构和限位柱,限位柱固定在安装底板上,轨道底板上开设有适于限位柱穿过的通孔,当活动轨道型材与上层固定轨道对接时,限位柱穿过通孔,插销机构的插销与安装在轨道底板上的插销座配合对活动轨道进行限位,能够提高活动轨道与上层固定轨道对接的精度和稳定性,而且可靠性更高,设备成本更低。
Crown block lifting device and crown block system
天车升降装置和天车系统
2025-01-03
Patent
Electronic Resource
Chinese
IPC: | B66C Krane , CRANES |
European Patent Office | 2024
|Crown block transportation system and crown block positioning method
European Patent Office | 2024
|