The invention discloses an automatic locking mechanism of a wafer box carrying trolley, which is characterized in that a pin guide plate is positioned and mounted on a middle plate through a guide plate mounting column, and is used for contacting with a positioning pin and guiding the wafer box carrying trolley to realize the positioning of the wafer box carrying trolley in the left-right direction. The locking block is installed on the locking base through a hinge pin and connected with the pull rod, the pull rod can rotate around a hinge under dragging of the pedal connecting rod to form a double-rocker connecting rod mechanism, downward force can be applied by a foot rest rod connected to the pedal connecting rod manually to achieve movement of the mechanism, and finally the mechanism is reset under the action of tension of a spring of the locking block and a tension spring. The trolley is manually pushed, the automatic locking mechanism is limited in multiple directions through the guide notch, the spring and the locking block, accurate positioning and automatic locking of an SEMI E83 standard interface are achieved, unlocking can be facilitated, and therefore the relative position of the trolley and the wafer loading structure is determined.

    本发明公开了一种晶舟盒搬运小车的自动锁止机构,销导向板通过导向板安装柱定位和安装在中间板上,其作用是接触定位销并导正晶舟盒搬运小车,实现晶舟盒搬运小车左右方向的定位。锁止块通过铰链销安装在锁止座上,并与拉杆相连,拉杆在脚踏连杆的拖动下可绕铰链转动,形成一个双摇杆连杆机构,人工可以在连接在脚踏连杆上的脚踏杆施加向下的力实现机构的运动,最终在锁止块弹簧和拉簧拉力的作用下复位。本发明通过人工推动小车,自动锁止机构经过导向槽口、弹簧和锁止块的多方向限位,实现与SEMI E83标准接口的准确定位和自动锁止,还可方便解锁,从而实现小车与晶圆装载结构的相对位置确定。


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    Title :

    Automatic locking mechanism of wafer box carrying trolley


    Additional title:

    一种晶舟盒搬运小车的自动锁止机构


    Contributors:
    XIA WENTONG (author) / ZHAO CHUANG (author) / WANG YANG (author)

    Publication date :

    2024-10-01


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Chinese


    Classification :

    IPC:    H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B62B Von Hand bewegte Fahrzeuge, z.B. Handkarren oder Kinderwagen , HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS



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