The invention relates to a crown block operation method and system, and the method comprises the steps: S10, a crown block walks along a track, and the track is provided with a plurality of address codes; s20, the crown block advances to an address code of a track; s30, an overlook sensor of the crown block irradiates the wafer box loading and unloading opening corresponding to the address code, and an irradiation light curtain of the wafer box loading and unloading opening is obtained; s40, binding an irradiation light curtain of the loading and unloading port of the wafer box with the address code, and storing; and S50, repeating the steps S20-S40 until the irradiation light curtains of all the wafer box loading and unloading ports are bound with the corresponding address codes and are stored. Before the crown block is put into use, the irradiation light curtain corresponding to each wafer box loading and unloading opening is obtained, and the working efficiency of subsequent wafer box taking and placing of the crown block can be effectively improved.
本发明涉及一种天车运行方法和系统,其中,方法包括:S10:天车沿着轨道行走,所述轨道设有多个地址码;S20:所述天车行进到轨道的一地址码处;S30:所述天车的俯视传感器对与该地址码对应的晶圆盒装卸口进行照射,获取所述晶圆盒装卸口的照射光幕;S40:所述晶圆盒装卸口的照射光幕与该地址码绑定,并进行存储;S50:重复S20‑S40,直至所有晶圆盒装卸口的照射光幕均与对应的地址码绑定并存储。本发明在天车投入使用前得到每一个晶圆盒装卸口对应的照射光幕,能够有效提高后续天车取放晶圆盒的工作效率。
Crown block operation method and system
天车运行方法和系统
2024-03-22
Patent
Electronic Resource
Chinese
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