The invention belongs to the field of crown block control systems, and discloses a speed control system and method for an intelligent wafer automatic carrying device, and the method comprises the steps: collecting data information in the operation process of a crown block; performing data processing on the data information to obtain path information of the crown blocks and the distance between two adjacent crown blocks; and comparing the distance between the two adjacent crown blocks with a preset safety distance threshold range according to the path information, and judging whether to generate a control instruction or not according to a comparison result. According to the method, the distance between the two adjacent crown blocks on the advancing track is obtained in real time, the safety distance of the crown blocks under different path conditions is precisely formulated according to the path information of the crown blocks, the crown blocks can be controlled to carry out deceleration alarm or parking alarm according to the specific safety distance under the different path conditions, and the operation efficiency of the crown blocks is improved.

    本发明属于天车控制系统领域,公开了一种智能晶圆自动搬运装置速度控制系统及方法,包括:采集天车运行过程中的数据信息;对数据信息进行数据处理,获取天车的路径信息,以及相邻两辆天车之间的距离;根据路径信息将相邻两辆天车之间的距离与预设安全距离阈值范围进行比对,并根据比对结果判定是否生成控制指令。本发明通过实时获取相邻两个天车在行进轨道上的距离,并根据天车的路径信息,精准化制定天车在不同路径情况下的安全距离,可以控制天车在不同路径情况下根据具体的安全距离进行减速报警或停车报警,提高天车的运行效率。


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    Title :

    Speed control system and method for intelligent wafer automatic carrying device


    Additional title:

    一种智能晶圆自动搬运装置速度控制系统及方法


    Contributors:
    LIN JIAN (author) / WANG PENG (author) / WU GUOMING (author) / WANG DONGLIANG (author)

    Publication date :

    2023-12-26


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Chinese


    Classification :

    IPC:    B66C Krane , CRANES / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES



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