The invention discloses silicon rod carrying equipment for semiconductor wafer production, and relates to the technical field of silicon rod carrying, the silicon rod carrying equipment comprises a cart, one side, close to a push rod, of the top of the cart is fixedly connected with a first fixing assembly used for stabilizing one side of a silicon rod stack, and two sides of the top of the cart are provided with second fixing assemblies used for stabilizing two ends of a silicon rod; the device designed by the invention can be unfolded and folded at the same time, the silicon rods can be conveniently placed on a trolley for carrying work in the unfolded state, and the device can stably fix the silicon rods and provide comprehensive support and shielding after being folded, so that the device is convenient to use and high in practicability. The device can effectively prevent the silicon rods from falling off and prevent foreign matters from being in contact with the silicon rods, so that the risk of damage to the silicon rods can be reduced, the surfaces and materials of the silicon rods can be protected, unfolding and fixing operation can be realized through rotation, the device can adapt to the silicon rods in different shapes, the production efficiency can be improved, and the safety of products can be ensured.
本发明公开了一种半导体晶圆生产用硅棒搬运设备,涉及硅棒搬运技术领域,包括推车,推车顶部靠近推杆的一侧固定连接有用于稳定硅棒堆一侧的第一固定组件,推车顶部两侧设置有用于稳定硅棒两端的第二固定组件,第二固定组件顶部设置有用于稳定硅棒堆另一侧的第三固定组件,本发明设计的装置可以同时展开和合拢,在展开状态下,可以方便地将硅棒放置在推车上进行搬运工作,而合拢后,装置能够稳定固定硅棒,并提供全方面的支撑和遮蔽,能够有效防止硅棒的掉落,并防止异物与硅棒接触,这样可以降低硅棒损坏的风险,保护硅棒的表面和材料,转动即可实现展开和固定操作,它可以适应不同形状的硅棒,能够提高生产效率并确保产品的安全。
Silicon rod carrying equipment for semiconductor wafer production
一种半导体晶圆生产用硅棒搬运设备
2023-11-14
Patent
Electronic Resource
Chinese
IPC: | B62B Von Hand bewegte Fahrzeuge, z.B. Handkarren oder Kinderwagen , HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS |
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