The invention provides wafer carrier cross-floor carrying equipment and a control method, the equipment comprises a hoister, a transition conveying line and outer conveying lines, a lift car conveying line is arranged in the hoister, each floor is provided with the outer conveying line, the outer conveying lines are installed outside a fireproof hoistway, the transition conveying line is arranged between the lift car conveying line and the outer conveying lines, and the outer conveying lines are arranged between the transition conveying line and the outer conveying lines. The wafer carriers are placed on the pallet, the pallet can move on the transition conveying line, the outer conveying line and the lift car conveying line, and the pallet is provided with a plurality of placing grooves for the wafer carriers of different specifications; and a pallet grabbing mechanism is arranged on the transition conveying line of at least one floor. The device is compatible with cross-floor carrying of wafer carriers of various types and various dimensions; the pallet grabbing mechanism does not need to wait for backflow of pallets, and the carrying efficiency is improved.
本发明提供了一种晶圆载具跨楼层搬送设备及控制方法,设备包括提升机、过渡输送线和外输送线,提升机内设置有轿厢输送线,每个楼层设置有外输送线,外输送线安装于防火井道外,过渡输送线设置于轿厢输送线与外输送线之间,晶圆载具放置在栈板上,栈板可在过渡输送线、外输送线和轿厢输送线上移动,栈板上设置有多个不同规格的晶圆载具的放置凹槽;至少一个楼层的过渡输送线上设置有栈板抓取机构。本发明兼容多种类型、多种尺寸规格的晶圆载具的跨楼层搬送;本发明通过栈板抓取机构无需等待栈板回流,提高搬送效率。
Wafer carrier cross-floor carrying equipment and control method
晶圆载具跨楼层搬送设备及控制方法
2025-01-10
Patent
Electronic Resource
Chinese
IPC: | B66B Aufzüge , ELEVATORS / B66C Krane , CRANES / B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last |
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