The invention belongs to the technical field of semiconductor processing, and particularly relates to a wafer transfer device. The transfer device comprises a conveying table and a conveying plate used for conveying wafers, a conveying cavity is formed in the conveying table, the conveying table is provided with a feeding port and a discharging port which are communicated with the conveying cavity, the feeding port is provided with an openable feeding valve, and the discharging port is provided with an openable discharging valve; the conveying plate is arranged in the conveying cavity and can move back and forth between the feeding port and the discharging port through the driving mechanism, the driving mechanism comprises a driving wheel, a driven wheel and a rack, the driving wheel is in transmission connection with the driven wheel, the conveying plate is arranged on the rack, and the rack is in meshing transmission with the driving wheel and the driven wheel. According to the transfer device, the driving structure of the conveying plate is simple and reliable, the rapid test switching function can be met, the wafer transmission transfer efficiency is improved, and the transfer device has good practicability.
本申请属于半导体加工技术领域,具体涉及一种晶圆中转装置。该中转装置包括传输台以及用于输送晶圆的输送板,传输台内设置有传输腔,传输台设置有和传输腔相通的进料口以及出料口,进料口上设置有可开启的进料阀门,出料口设置有可开启的出料阀门;输送板设置在传输腔内,输送板通过驱动机构可在进料口以及出料口之间往返移动,驱动机构包括主动轮、从动轮、齿条,主动轮和从动轮传动连接,传输板设置在齿条上,齿条分别和主动轮和从动轮啮合传动。本申请的中转装置的输送板的驱动结构简单可靠,能满足快速测试切换功能,以提高晶圆的传输中转效率,具有很好的实用性。
Wafer transfer device
晶圆中转装置
2022-05-13
Patent
Electronic Resource
Chinese
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