The invention relates to the technical field of silicon wafer processing, and discloses a silicon wafer transfer trolley which comprises a trolley body, the trolley body is provided with a partition plate, breast boards are fixedly installed on the periphery of the top end of the partition plate, dripping holes are formed in the upper surface of the partition plate, and supporting columns are arranged on the periphery of the bottom end of the partition plate. The top end of the supporting columns is movably sleeved with a triangular placing plate, and the bottom end of the partition plate is placed on the upper surface of the triangular placing plate. According to the silicon wafer transfer trolley, the triangular placing plate is arranged in the fixing columns, the four corners of the partition plate are placed above the triangular placing plate, and when the transfer trolley encounters a bumpy road surface, springs below the triangular placing plate can convert acting force borne bythe transfer trolley into self-generated deformation of the springs through elasticity of the springs so as to counteract borne vibration; therefore, the partition plate placed on the triangular placing plate tends to be stable, vibration borne by the silicon wafer is reduced, and the effect of preventing the silicon wafer from being collided is achieved.
本发明涉及硅片加工技术领域,且公开了一种硅片转运车,包括推车本体,所述推车本体设有隔板,所述隔板顶端的四周固定安装有栏板,所述隔板上表面开设有滴落孔,所述隔板底端的四周设有支撑柱,所述支撑柱的顶端活动套接有三角放置板,所述隔板的底端放置在三角放置板的上表面。该硅片转运车,通过在固定柱内设有三角放置板,将隔板的四角放置在三角放置板的上方,当转运车遇到颠簸不平的路面时,三角放置板下方的弹簧会利用自身弹性将转运车所受到的作用力转变成弹簧自生形变以抵消所受到的震动,从而使放置在三角放置板上方的隔板趋于平稳,使硅片所受到的震动减小,实现了防止硅片磕碰的效果。
Silicon wafer transfer trolley
一种硅片转运车
2021-02-23
Patent
Electronic Resource
Chinese
IPC: | B62B Von Hand bewegte Fahrzeuge, z.B. Handkarren oder Kinderwagen , HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS |
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