The wafer storage box transfer trolley body structure convenient to stack comprises a base and a trolley body cabinet, the trolley body cabinet is installed above the surface of the base, an upper cabinet body is arranged above the trolley body cabinet, a middle cabinet body is arranged in the middle of the trolley body cabinet, and a lower cabinet body is arranged below the trolley body cabinet; the volume of an inner cavity of the middle cabinet body is larger than that of inner cavities of the upper cabinet body and the lower cabinet body, a stacking frame is installed in the middle cabinet body, a stacking table is arranged on the surface of the stacking frame, and nitrogen structure assemblies are arranged in the middle of the top face of the vehicle body cabinet and above the two sides of the outer wall of the vehicle body cabinet. A concentration detection mechanism is installed on one side of the top of the vehicle body cabinet, a front door is installed on the front side of the vehicle body cabinet, a nitrogen structure assembly is arranged in the vehicle body structure, and nitrogen can be used for storage in the wafer transferring and conveying process of the device, so that the use quality of the stored wafers is ensured.
本发明公开了一种便于码放的晶圆储存盒转运车车体结构,包括底座和车体柜,所述底座的表面上方安装有车体柜,所述车体柜的上方为上部柜体,所述车体柜的中部为中部柜体,所述车体柜的下方为下部柜体,所述中部柜体的内腔体积分别大于上部柜体和下部柜体的内腔体积,所述中部柜体内部安装有码放架,所述码放架的表面设置有码放台,所述车体柜的顶面中部和外壁两侧上方均设置有氮气结构组件,所述车体柜的顶部一侧安装有浓度检测机构,所述车柜体的前侧安装有前置门,该发明通过在该车体结构中设置氮气结构组件,能够时装置在晶圆转移运送的过程中使用氮气进行保存,以确保晶圆被储存起来后的使用质量。
Wafer storage box transfer trolley body structure facilitating stacking
一种便于码放的晶圆储存盒转运车车体结构
2024-01-16
Patent
Electronic Resource
Chinese
IPC: | B62B Von Hand bewegte Fahrzeuge, z.B. Handkarren oder Kinderwagen , HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS / B65D Behältnisse zur Lagerung oder zum Transport von Gegenständen oder Materialien [Container], z.B. Säcke, Beutel, Fässer, Flaschen, Dosen, Kästen, Büchsen, Schachteln, Packkörbe, Tonnen, Gläser, Flüssigkeitsbehälter, Trichtersilos, Transportbehälter , CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS |
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