A precision yaw rate sensor in silicon micromachining
Ein feinstbearbeiteter Praezisions-Gierwinkelsensor.
1998
5 pages
SAE-Paper;980267;1998;Sensors and Actuators 1998;SAE Spec.Publ.; SP-1312
Miscellaneous
English
A Precision Yaw Rate Sensor in Silicon Micromachining
SAE Technical Papers | 1998
|A Precision Yaw Rate Sensor in Silicon Micromachining
British Library Conference Proceedings | 1998
|Yaw Rate Sensor in Silicon Micromachining Technology for Automotive Applications
British Library Conference Proceedings | 1998
|Yaw Rate Sensor in Silicon Micromachining Technology for Automotive Applications
British Library Conference Proceedings | 1998
|Side Airbag Sensor in Silicon Micromachining
SAE Technical Papers | 1999
|