Access

    Access via TIB

    Check availability in my library


    Export, share and cite



    Title :

    A precision yaw rate sensor in silicon micromachining


    Additional title:

    Ein feinstbearbeiteter Praezisions-Gierwinkelsensor.



    Publication date :

    1998


    Size :

    5 pages


    Remarks:

    SAE-Paper;980267;1998;Sensors and Actuators 1998;SAE Spec.Publ.; SP-1312


    Type of media :

    Miscellaneous


    Type of material :

    Print


    Language :

    English



    A Precision Yaw Rate Sensor in Silicon Micromachining

    Maihöfer, B. / Schubert, D. / Gerstenmeier, J. et al. | SAE Technical Papers | 1998


    A Precision Yaw Rate Sensor in Silicon Micromachining

    Lutz, M. / Golderer, W. / Gerstenmeier, J. et al. | British Library Conference Proceedings | 1998


    Yaw Rate Sensor in Silicon Micromachining Technology for Automotive Applications

    Golderer, W. et al. | British Library Conference Proceedings | 1998


    Yaw Rate Sensor in Silicon Micromachining Technology for Automotive Applications

    Fetzer, G. / Golderer, W. / Gerstenmeier, J. et al. | British Library Conference Proceedings | 1998


    Side Airbag Sensor in Silicon Micromachining

    Maihöfer, B. / Ullmann, D. / Bischopink, G. et al. | SAE Technical Papers | 1999