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    Title :

    A Precision Yaw Rate Sensor in Silicon Micromachining



    Conference:

    Session, Sensors and actuators ; 1998 ; Detroit; MI


    Published in:

    SAE SP ; 1312


    Publication date :

    1998-01-01


    Size :

    6 pages


    Remarks:

    Held as part of the 1998 SAE International congress and exposition




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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