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    Title :

    Silicon Micromachining Technology for Automotive Applications


    Additional title:

    Silikon Mikrobearbeitungstechnologie zur Anwendung im Fahrzeugbau.



    Publication date :

    1986


    Size :

    10 pages


    Remarks:

    SAE-Paper;860470;1986;Sensors and Actuators;SAE Spec.Publ.; SP-655


    Type of media :

    Miscellaneous


    Type of material :

    Print


    Language :

    English



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