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    Title :

    Super-slim 2 axes automotive accelerometer using MEMS technology


    Additional title:

    Super-duenne 2-Achsen automotive Beschleunigungssensoren unter Anwendung der Mikrosystemtechnik.


    Contributors:

    Publication date :

    2009


    Size :

    6 pages


    Remarks:

    SAE-Paper;2009-01-0636;2009;Vehicle Sensors and Actuators;SAE Spec.Publ.; SP-2229


    Type of media :

    Miscellaneous


    Type of material :

    Print


    Language :

    English



    Super-slim 2 Axes Automotive Accelerometer Using MEMS Technology

    Yokura, Hisanori / Yokoyama, Kenichi / Furuichi, Takamoto | SAE Technical Papers | 2009


    2009-01-0636 Super-slim 2 Axes Automotive Accelerometer Using MEMS Technology

    Yokoyama, K. / Furuichi, T. / Yokura, H. et al. | British Library Conference Proceedings | 2009


    Super Slim Automotive Acceleration Sensor Applied MEMS Technology

    Isobe, Y. | British Library Conference Proceedings | 2006


    Super Slim Automotive Acceleration Sensor Fabrication Process Developed by Applying Surface MEMS Technology

    Muto, Hiroshi / Sugiura, Kazuhiko / Asami, Kazushi et al. | SAE Technical Papers | 2006


    Super slim automotive acceleration sensor fabrication process developed by applying surface MEMS technology

    Yokoyama, K. / Sugiura, K. / Fukada, T. et al. | British Library Conference Proceedings | 2006