The advanced technology necessary for building future space exploration vehicles includes microfabricated coils for making possible self‐inductances integrated with other passive and active electronic components. Integrated inductances make possible significant improvements in reliability over the traditional arrangement of using external discrete inductances, as well as allowing significant size (volume) reductions (also important in space vehicles). Two possible fabrication techniques (one using proprietary branded “Foturan” glass, the other using silicon wafer substrates) for microscopic coils are proposed, using electroplating into channels. The techniques have been evaluated for fabricating the planar electrical coils needed for typical microelectromechanical systems applications. There remain problems associated with processing using “Foturan” glass, but coil fabrication on silicon wafers was successful. Fabrication methods such as these are expected to play an important part in the development of systems and subsystems for forthcoming space exploration missions.


    Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Techniques For Microfabricating Coils For Microelectromechanical Systems Applications


    Contributors:

    Conference:

    SPACE TECHNOLOGY AND APPLICATIONS INTERNATIONAL FORUM‐STAIF 2008: 12th Conference on Thermophysics Applications in Microgravity; 1st Symposium on Space Resource Utilization; 25th Symposium on Space Nuclear Power and Propulsion; 6th Conference on Human/Robotic Technology and the Vision for Space Exploration; 6th Symposium on Space Colonization; 5th Symposium on New Frontiers and Future Concept ; 2008 ; Albuquerque (New Mexico)


    Published in:

    AIP Conference Proceedings ; 969 , 1 ; 969-976


    Publication date :

    2008-01-21


    Size :

    8 pages





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    Microelectromechanical systems for aerodynamics applications

    Mehregany, Mehran / Reshotko, Eli / DeAnna, Russell | AIAA | 1996


    Military applications of microelectromechanical systems

    Brendly, K.W. / Steeb, R. | Tema Archive | 1993


    MicroElectroMechanical Systems

    Gabriel, K. J. / Association for Unmanned Vehicle Systems International | British Library Conference Proceedings | 1997


    MicroElectroMechanical Systems (MEMS)

    Gabriel, K. J. / IEEE; Aerospace and Electronics Systems Society | British Library Conference Proceedings | 1997


    Microelectromechanical Systems (MEMS)

    Ramesham, R. | NTRS | 1999