Microelectromechanical systems (MEMS) or, more broadly, microengineered systems are essentially small devices on the scale of a few millimeters or less. They are often made using variations on techniques used in fabricating electronics; silicon is etched to create very fine, often very flat, structures. However, instead of transistors and diodes, small motors, gears, and sensors are made. Other techniques such as deep X-ray (synchrotron) lithography, electric discharge machining, and acoustic laser etching area also employed, often to cerate three-dimensional structures. These and other techniques are touched upon in the body of this report. The authors sketch five potential military applications in this report. They are all system applications, that is, MEMS technology provides the key equipment for a military system. They make no claim that these are the best applications or approaches. They simply give us a concrete form with which to understand what sorts of technolohies would appear useful to a system designer. The five systems are: Chemical sensor for the soldier, Identification friend or foe, Active surfaces, Distributed sensor net, Microrobotic electronic disabling system.
Military applications of microelectromechanical systems
Militärische Anwendungen von Mikroelektromechaniksystemen
Rand Reports ; 1-57
1993
57 Seiten, 8 Bilder, 3 Tabellen, Quellen
Report
English
MicroElectroMechanical Systems
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