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    Title :

    Micromachined inductive suspensions with 3D wirebonded microcoils


    Contributors:
    Lu, Zhiqiu (author) / Shaker Verlag (publisher)


    Publication date :

    2017


    Size :

    v, 110 Seiten


    Remarks:

    24 cm, 183 g
    Illustrationen
    Digital preservation by Universitätsbibliothek Freiburg



    Type of media :

    Theses


    Type of material :

    Print


    Language :

    English



    Classification :

    DDC:    621.34
    BKL:    50.94 Mikrosystemtechnik, Nanotechnologie / 53.33 Elektrische Maschinen und Antriebe



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