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    Title :

    Fabrication of microcoils with narrow and high aspect ratio coil lines


    Contributors:
    Noda, D. (author) / Setomoto, M. (author) / Kobayashi, Y. (author) / Hattori, T. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 16 , 8-9 ; 1479-1483


    Publication date :

    2010-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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