Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Micromachined Sensors and Actuators Based on Bent-Beam Suspensions



    Conference:

    9th, International Conference on Smart Materials, Structures and Systems ; 1999 ; Bangalore, India



    Publication date :

    1999-01-01


    Size :

    8 pages


    Remarks:

    in conjunction with the ninth National Seminar on Aerospace Structures; Includes bibliographical references and index



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Reliability of Resonant Micromachined Sensors and Actuators

    Sparks, D. / Chia, M. / Zarabadi, S. | SAE Technical Papers | 2001


    Reliability of resonant micromachined sensors and actuators

    Sparks,D. / Chia,M. / Zarabadi,S. et al. | Automotive engineering | 2001


    2001-01-0618 Reliability of Resonant Micromachined Sensors and Actuators

    Sparks, D. / Chia, M. / Zarabadi, S. et al. | British Library Conference Proceedings | 2001