Micromachined Sensors and Actuators Based on Bent-Beam Suspensions
9th, International Conference on Smart Materials, Structures and Systems ; 1999 ; Bangalore, India
01.01.1999
8 pages
in conjunction with the ninth National Seminar on Aerospace Structures; Includes bibliographical references and index
Aufsatz (Konferenz)
Englisch
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Reliability of resonant micromachined sensors and actuators
Kraftfahrwesen | 2001
|Reliability of Resonant Micromachined Sensors and Actuators
SAE Technical Papers | 2001
|2001-01-0618 Reliability of Resonant Micromachined Sensors and Actuators
British Library Conference Proceedings | 2001
|Feedback control of vibrations in a micromachined cantilever beam with electrostatic actuators
Online Contents | 1998
|