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    Titel :

    2001-01-0618 Reliability of Resonant Micromachined Sensors and Actuators


    Beteiligte:

    Kongress:

    Session, Sensors and actuators 2001 ; 2001 ; Detroit, MI



    Erscheinungsdatum :

    01.01.2001


    Format / Umfang :

    8 pages


    Anmerkungen:

    Session held during the SAE 2001 world congress



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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