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    Title :

    Optical metrology roadmap for the semiconductor, optical, and data storage industries : 30 - 31 July 2000, San Diego, USA


    Contributors:

    Conference:

    Conference ; 2000 ; San Diego, Calif. Conference (San Diego, Calif.) : 2000.07.30-31


    Published in:

    Publication date :

    2000


    Size :

    IX, 328 S



    Type of media :

    Conference Proceedings


    Type of material :

    Print


    Language :

    English



    Classification :

    DDC:    621.381/045



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