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    Title :

    Optical metrology roadmap for the semiconductor, optical, and data storage industries



    Conference:

    Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries Conference ; 2001 ; San Diego, Calif. Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries Conference (San Diego, Calif.) : 2001.08.02-03
    Annual SPIE International Symposium on Optical Science and Technology ; 46 ; 2001 ; San Diego, Calif.
    Annual SPIE International Symposium on Optical Science and Technology ; 46 (San Diego, Calif.) : 2001.08.02-03



    Publication date :

    2001


    Size :

    IX, 294 S


    Remarks:

    Digital preservation by Technische Informationsbibliothek (TIB) / Leibniz-Informationszentrum Technik und Naturwissenschaften und Universitätsbibliothek



    Type of media :

    Conference Proceedings


    Type of material :

    Print


    Language :

    English



    Classification :

    DDC:    621.381/045




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