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    Title :

    A novel method to reduce the period limitation in laser interference lithography


    Contributors:
    Dai, L. (author) / Xuan, M. (author) / Ding, P. (author) / Jiang, Y. (author) / Ma, Z. (author) / Jia, H. (author) / Wang, W. (author) / Zhou, J. (author) / Chen, H. (author)

    Published in:

    Publication date :

    2015-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    537.5



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