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    Title :

    Fabrication of nano-gap structures based on plastic deformation of strained Si springs by stiction effects


    Contributors:
    Toda, M. (author) / Yokoyama, A. (author) / Toan, N. (author) / Inomata, N. (author) / Ono, T. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 21 , 3 ; 649-654


    Publication date :

    2015-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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