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    Title :

    Overcoming SU-8 stiction in high aspect ratio structures


    Contributors:
    Peele, A. G. (author) / Shew, B. Y. (author) / Vora, K. D. (author) / Li, H. C. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 11 , 2/3 ; 221-224


    Publication date :

    2005-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Fabrication of support structures to prevent SU-8 stiction in high aspect ratio structures

    Vora, K. D. / Peele, A. G. / Shew, B. Y. et al. | British Library Online Contents | 2007


    High-aspect-ratio wings

    Peterson, John B., Jr. | NTRS | 1988


    High aspect ratio wings

    Bruner, G. | Engineering Index Backfile | 1950


    High-Aspect-Ratio Wings

    J. B. Peterson | NTIS | 1988


    Analysis of low-aspect-ratio aircraft structures

    Samson, Jr., C.H. / Bergmann, H. | Engineering Index Backfile | 1960