Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Mechanical strengthening of Si cantilever by chemical KOH etching and its surface analysis by TEM and AFM


    Contributors:
    Shikida, M. (author) / Niimi, Y. (author) / Hasegawa, T. (author) / Sugino, T. (author) / Hamaoka, S. (author) / Fukuzawa, K. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 21 , 3 ; 661-668


    Publication date :

    2015-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Mechanical strengthening of Si cantilevers by chemical wet etching

    Shikida, M. / Hasegawa, T. / Hamaguchi, K. et al. | British Library Online Contents | 2013


    Mechanical cantilever lifting mechanism

    CAI BAOMIN / YANG JINBAO / WEI YONG | European Patent Office | 2024

    Free access

    Strengthening of Mechanical Engineering Parts Using Chemical-Thermocycling Treatment

    Berladir, Khrystyna / Hovorun, Tetiana / Pavlenko, Ivan et al. | TIBKAT | 2023


    Strengthening of Mechanical Engineering Parts Using Chemical-Thermocycling Treatment

    Berladir, Khrystyna / Hovorun, Tetiana / Pavlenko, Ivan et al. | Springer Verlag | 2023


    Influence of surface effect on mechanical properties of thermo-mechanical porous cantilever nanobeams

    LI Qinglu / ZHAO Xuanhe / ZHANG Jinghua et al. | DOAJ | 2024

    Free access