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    Title :

    Mechanical strengthening of Si cantilevers by chemical wet etching


    Contributors:
    Shikida, M. (author) / Hasegawa, T. (author) / Hamaguchi, K. (author) / Sato, K. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 4 ; 547-553


    Publication date :

    2013-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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