Mechanical strengthening of Si cantilevers by chemical wet etching
MICROSYSTEM TECHNOLOGIES ; 19 , 4 ; 547-553
01.01.2013
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
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British Library Online Contents | 2015
|Design of oscillating cantilevers
Engineering Index Backfile | 1947
|The Design of Oscillating Cantilevers
Emerald Group Publishing | 1947
|A boulevard supported on cantilevers
Engineering Index Backfile | 1905