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    Title :

    A MEMS packaged capacitive pressure sensor employing 3C-SiC with operating temperature of 500 °C


    Contributors:
    Marsi, N. (author) / Majlis, B. Y. (author) / Hamzah, A. A. (author) / Mohd-Yasin, F. (author)

    Published in:

    Publication date :

    2015-01-01


    Size :

    12 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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