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    Title :

    Modeling and simulation of metal organic halide vapor phase epitaxy (MOHVPE) growth chamber



    Published in:

    MICROSYSTEM TECHNOLOGIES ; 21 , 1 ; 309-318


    Publication date :

    2015-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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