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    Title :

    Replication of sub-100 nm structures using h- and s-PDMS composite stamps


    Contributors:
    Huelsen, C. (author) / Probst, J. (author) / Loechel, B. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 10-11 ; 2001-2004


    Publication date :

    2014-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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