Replication of sub-100 nm structures using h- and s-PDMS composite stamps
MICROSYSTEM TECHNOLOGIES ; 20 , 10-11 ; 2001-2004
01.01.2014
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
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Soft lithography replication based on PDMS partial curing
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