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    Title :

    Soft lithography replication based on PDMS partial curing


    Contributors:
    Yu, H. (author) / Zhou, G. (author) / Chau, F. S. (author) / Sinha, S. K. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 17 , 3 ; 443-449


    Publication date :

    2011-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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